top of page

CANON Spare Parts for Sale

Parts for:FPA-3000 EX3 DUV Stepper, FPA-3000 EX4 DUV Stepper, FPA-3000 EX5 DUV Stepper, FPA-3000 EX6 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5+ Stepper, FPA-3000 i5++ Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper, FPA-5000 ES3 DUV Scanner, FPA5000 ES2 DUV Scanner...
(Please confirm the actual applicable Model by yourself)

In Front Serial number & Parts name

1. BG3-3306
2. BG4-5459 
3. BG4-6458 
4. BG4-6460 
5. BG4-6463 
6. BG4-6633
7. BG4-8224
8. BG4-8591 
9. BG4-8592
10. BG4-8615
11. BG4-8616
12. BG4-8700
13. BG4-8705
14. BG4-8815
15. BG4-3501
16. BG4-3502
17. 7007 Fold Mirror Zygo
18. Accelerometer ACC-X
19. Accelerometer ACC-Y
20. C-Oil Supply Module
21. Door
22. HP Key Board
23. JCC Keyboard
24. Linear Sensor FUJI PE-LA10D
25. Mirror (triangle)
26. Mirror Bar(Long)
27. Mirror Bar(Short)
28. Pressure Switch PSA4-102VP 6ea/set
29. Pressure Transmitter PTA427C
30. Reflection Mirror X
31. Reflection Mirror Y
32. Reflection Mirror θ
33. Robot Finger
34. SERVO DRIVER DBAP-FA-Z
35. ULEX23 C0022
36. Zygo 7024Plane Mirror Zygo 7003A Retroreflector
37. Zygo 7024A Plane Mirror Zygo 7003ARetroreflector
38. EX019(962502-a b c)
39. Power supply
40. BG4-6456
41. BG4-6457
42. BG4-8680
43. BG4-6755、BG4-9028
44. Laser Module E021B
45. Laser Module E021C
46. Door
47. BG4-8603 CAMERA
48. BG3 7525
49. Power supply BH5-3523
Back Side ​Serial number & Parts name
 
1. BG8-3537、BG3-2389、BG3-3696​ 
2. BG4-9780 
3. BG4-6458、BG4-6663 
4. BG8-2669 
5. BG4-9005、BG8-2667 
6.  
7. BG8-3326、BG3-2090 
8. BG4-8976、BG8-3356
9. BG8-3357、BG3-2345
10. BG4-6591、BG4-6598
11.
12. BG8-3368
13. BG4-8073 Oil Supply Module
14. BG4-8998、BG8-3380 CDIF2
15. BG9-3793、BG8-3363、BG8-2253
16. BG8-2254
17. 9621
18.
19.
20.
21.
22.
23.
24. BG4-8628
25. E020
26.
27.
28.
29.
30. 9622
31. 9622
32. 9622
33.
34. 24V 300W 500 PPR
35. 960712-A、960712-B、4308
36. 9633
37. 9622
38. 
39. Prestige ext
40.
41. BG4-9011、BG8-2670
42. BG8-3369
43. BG8-2672
44. BG4-6583
45. BG4-6583
46.
47. Texas Instruments MC-780P
48.
49. Fujitsu Access

聯繫我們

聯絡電話

電話 : 03-419-2612
行動電話 : 0911-321-732

電子郵件

E-MAIL : kts.kim@msa.hinet.net

公司地址

324-61 桃園市平鎮區麻園街29巷3號

KT Solution Tech Co.,Ltd.
No. 3, Ln. 29, Mayuan St., Pingzhen Dist.,
Taoyuan City, 324-61, TAIWAN
Tel : +886-3-419-2612
H.P : +886-911-321-732
E-mail : kts.kim@msa.hinet.net

bottom of page